A MoS₂ Nanoflakes-Based LC Wireless Passive Humidity Sensor

In this study, an LC wireless passive humidity sensor based on MoS₂ nanoflakes was proposed. The LC wireless passive humidity sensor was optimized by performing HFSS simulations and fabricated via a screen-printing technique. The MoS₂ nanoflakes were characterized by laser scanning confocal microcopy, scanning electron microscope, and X-ray diffraction. The measurements show the sensor can operate stably for a long time with a hysteresis of 4% RH (relative humidity) in 10⁻95% RH. At low humidity environment (10⁻60% RH), the sensitivity of the as-prepared humidity sensor is 2.79 kHz/% RH, and a sensitivity of 76.04 kHz/% RH was realized in a high humidity environment (60⁻95% RH). In this regard, the sensing mechanism was discussed in the scope of proton transfer theory. The test results also indicate that the response time and recovery time of the prepared sensor are 10 s, 15 s, respectively and between 15~40 °C the sensitivity of sensor was not temperature-dependent in the range of 10~80% RH. In addition, the sensor shows less sensitivity to temperature in the 15⁻25 °C range at 90% RH. All of these experimental results show that the prepared LC wireless passive humidity sensor can stably monitor the rapidly changing humidity in a sealed and narrow environment for a long time.