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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Current driven magnetic actuation of a MEMS silicon beam in a transmission electron microscope

Nicolas Lobato-Dauzier1, Matthieu Denoual2, Takaaki Sato3

  • 1Institute of Industrial Science, The University of Tokyo,Tokyo, Japan; LIMMS, CNRS-Institute of Industrial Science, UMI 2820, The University of Tokyo, Tokyo, Japan.

Ultramicroscopy
|December 21, 2018
PubMed

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