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A novel micromachined Fabry-Perot interferometer integrating nano-holes and dielectrophoresis for enhanced

Long Tu1, Liang Huang2, Wenhui Wang2

  • 1State Key Laboratory of Precision Measurement Technology and Instrument, Department of Precision Instrument, Tsinghua University, Beijing, China; National Innovation Institute of Defense Technology, Beijing, China.

Biosensors & Bioelectronics
|December 25, 2018
PubMed

Keywords:
Biochemical sensorDielectrophoresis (DEP)Extraordinary optical transmission (EOT)Fabry–Perot microcavityNano-hole

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