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Updated: Jan 31, 2026

Employing the Forced Oscillation Technique for the Assessment of Respiratory Mechanics in Adults
Published on: February 9, 2022
Comparison of a micro-electro-mechanical system airflow sensor with the pneumotach in the forced oscillation
Xiaohe K Xu1, Brian P Harvey2, Kenneth R Lutchen2
1Feather Sensors, LLC, Millville, NJ 08332, USA, ned@feathersensor.com.
Purpose:
This study supports the use of thin-film micro-electro-mechanical system (MEMS) airflow sensors in the forced oscillation technique.
Materials And Methods:
The study employed static testing using air flow standards and computer-controlled sound attenuations at 8 Hz. Human feasibility studies were conducted with a testing apparatus consisting of a pneumotach and thin-film MEMS air flow sensors in series. Short-time Fourier transform spectra were obtained using SIGVIEW software.
Results:
Three tests were performed, and excellent correlations were observed between the probes. The thin-film MEMS probe showed superior sensitivity to higher frequencies up to 200 Hz.
Conclusion:
The results suggest that lower-cost thin-film MEMS can be used for forced oscillation technique applications (including home care devices) that will benefit patients suffering from pulmonary diseases such as asthma, COPD, and cystic fibrosis.
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