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A Study on Parametric Amplification in a Piezoelectric MEMS Device.

Miguel Gonzalez1, Yoonseok Lee2

  • 1Aramco Research Centerā»Houston, Aramco Services Company, Houston, TX 77084, USA. miguel.gonzalez@aramcoservices.com.

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|January 2, 2019
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Summary

Researchers enhanced micro-electro-mechanical systems (MEMS) performance in fluids by using parametric resonance to overcome damping effects. This method achieved a four-fold increase in the resonator's quality factor (Q), improving MEMS functionality.

Keywords:
MEMSnonlinear systemsparametric resonance

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Area of Science:

  • Micro-electro-mechanical systems (MEMS)
  • Resonant MEMS devices
  • Fluid damping mitigation

Background:

  • Fluid damping significantly degrades MEMS performance in various applications.
  • Overcoming damping is crucial for reliable MEMS operation in fluidic environments.
  • Standard fabrication processes often limit MEMS performance in damping-heavy conditions.

Purpose of the Study:

  • Investigate mechanical amplification via parametric resonance to counteract fluid damping in MEMS.
  • Enhance the quality factor (Q) of piezoelectrically actuated MEMS resonators.
  • Demonstrate performance improvements in MEMS devices fabricated using standard commercial processes.

Main Methods:

  • Fabrication of a double-clamped cantilever beam MEMS device using the PiezoMUMPS process (SOI with AlN layer).
  • Piezoelectric actuation and excitation at the first resonance mode in air at atmospheric conditions.
  • Application of a parametric signal at twice the excitation frequency to modulate beam stiffness.
  • Optical detection of device displacement to measure quality factor (Q) and spring modulation constant.

Main Results:

  • Achieved a four-fold increase in the resonator's quality factor (Q) with parametric excitation.
  • Quantified the spring modulation constant from the effective quality factor (Qeff) versus parametric excitation voltage.
  • Demonstrated significant performance improvements in MEMS devices.

Conclusions:

  • Parametric resonance effectively overcomes damping effects in MEMS devices.
  • The developed method significantly enhances the quality factor (Q) of resonators.
  • Standard commercial MEMS fabrication processes can be leveraged for improved performance in fluidic environments.