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Updated: Jan 31, 2026

Niobium Oxide Films Deposited by Reactive Sputtering: Effect of Oxygen Flow Rate
Published on: September 28, 2019
Low-Temperature Thermally Annealed Niobium Oxide Thin Films as a Minimally Color Changing Ion Storage Layer in
Jiazhi He1, Liyan You1, Dung T Tran1
1Department of Chemistry , Purdue University , 560 Oval Drive , West Lafayette , Indiana 47907 , United States.
Abstract:
The limited availability of solution-processable ion storage materials, both inorganic and organic, hinders the adoption of roll-to-roll manufacturing for polymer electrochromic devices (ECDs). The n-type transition metal oxides are known for their ion storage properties. However, the fabrication methods of their amorphous metal oxide thin films typically involve sputtering, thermal deposition, electrical deposition, or sol-gel deposition followed by high-temperature thermal annealing (>300 °C), thus making them incompatible for low-cost roll-to-roll manufacturing on flexible substrates. In this study, we report the synthesis of amorphous niobium oxide(a-Nb2O5) thin films from sol-gel precursors through the combination of photoactivation and low-temperature thermal annealing (150 °C). Coupled with p-type electrochromic polymers (ECPs), solution-processed a-Nb2O5 thin films were evaluated as a minimally color changing counter electrode (MCC-CE) material for electrochromic devices. We found that ultraviolet ozone (UVO) treated and 150 °C thermally annealed (UVO-150 °C) a-Nb2O5 thin films show excellent electrochemical properties and cycling stability. Notably, a-Nb2O5/ECP-magenta ECD has a high optical contrast of ∼70% and a fast switching time (bleaching and coloring time of 1.6 and 0.5 s for reaching 95% of optical contrast). In addition, the ECD demonstrates a high coloration efficiency of ∼849.5 mC cm-2 and a long cycling stability without a noticeable decay up to 3000 cycles.
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