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Nanostructure and Optical Property Investigations of SrTiO₃ Films Deposited by Magnetron Sputtering

Da Xu1, Yafei Yuan2,3, Huanfeng Zhu4

  • 1Department of Optical Science and Engineering, Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Fudan University, Shanghai 200433, China. 09210720010@fudan.edu.cn.

Materials (Basel, Switzerland)
|January 6, 2019
PubMed

Keywords:
magnetron sputteringoptical propertiesstrontium titanate filmthermal treatment

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