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Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption.

Debo Wei1,2, Jianyu Fu3,4, Ruiwen Liu5

  • 1Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China. weidebo@ime.ac.cn.

Sensors (Basel, Switzerland)
|January 10, 2019
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This study presents a novel diode-based micro-Pirani vacuum sensor. It achieves high sensitivity with significantly reduced power consumption, enabling battery-powered applications.

Keywords:
diodehighly sensitivelow power consumptionmicro-Pirani vacuum sensor

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Area of Science:

  • Materials Science
  • Electrical Engineering
  • Sensor Technology

Background:

  • Traditional micro-Pirani vacuum sensors consume significant power (hundreds of microwatts).
  • This high power consumption limits their use in battery-operated systems.
  • A need exists for low-power, high-sensitivity vacuum sensing solutions.

Purpose of the Study:

  • To develop a diode-based micro-Pirani vacuum sensor with low power consumption and high sensitivity.
  • To optimize sensor design for enhanced temperature variation and greater temperature coefficient.
  • To enable the use of micro-Pirani sensors in power-constrained environments.

Main Methods:

  • Utilized series diodes to achieve a higher temperature coefficient without increasing power draw.
  • Redesigned the sensor's structure and geometries to maximize temperature variation.
  • Fabricated and tested the optimized diode-based micro-Pirani vacuum sensor.

Main Results:

  • Achieved a dynamic vacuum pressure range from 10⁻¹ to 10⁴ Pa.
  • Operated effectively at a low forward bias current of 10 μA, consuming only 50 μW.
  • Demonstrated high average sensitivity of 90 μV/Pa and unit power consumption sensitivity of 1.8 V/W/Pa.

Conclusions:

  • The developed diode-based micro-Pirani vacuum sensor offers a viable low-power alternative.
  • High sensitivity and low power consumption make it suitable for battery-powered sensor systems.
  • Further performance improvements are possible by operating at higher forward bias currents.