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Published on: August 20, 2007
Fabrication and Characterization of AlGaN-Based UV LEDs with a ITO/Ga₂O₃/Ag/Ga₂O₃ Transparent Conductive Electrode
Hong Wang1,2,3, Quanbin Zhou4, Siwei Liang5,6
1Engineering Research Center for Optoelectronics of Guangdong Province, School of Electronics and Information Engineering, South China University of Technology, Guangzhou 510640, China. phhwang@scut.edu.cn.
Abstract:
We fabricated a complex transparent conductive electrode (TCE) based on Ga₂O₃ for AlGaN-based ultraviolet light-emitting diodes. The complex TCE consists of a 10 nm ITO, a 15 nm Ga₂O₃, a 7 nm Ag, and a 15 nm Ga₂O₃, forming a ITO/Ga₂O₃/Ag/Ga₂O₃ multilayer. The metal layer embedded into Ga₂O₃ and the thin ITO contact layer improves current spreading and electrode contact properties. It is found that the ITO/Ga₂O₃/Ag/Ga₂O₃ multilayer can reach a 92.8% transmittance at 365 nm and a specific contact resistance of 10-3 Ω·cm² with suitable annealing conditions.
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