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All-Inorganic Flexible Embedded Thin-Film Capacitors for Dielectric Energy Storage with High Performance

Zhongshuai Liang1,2, Ming Liu1,2, Lvkang Shen1,2

  • 1School of Microelectronics , Xi'an Jiaotong University , Xi'an 710049 , China.

ACS Applied Materials & Interfaces
|January 15, 2019
PubMed

Keywords:
all-inorganic embedded capacitorsenergy storagefatigue stabilityflexiblewide temperature range

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