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Updated: Jan 30, 2026

Microwave Photonics Systems Based on Whispering-gallery-mode Resonators
Published on: August 5, 2013
Efficient Excitation of Micro/Nano Resonators and Their Higher Order Modes
N Jaber1, M A A Hafiz1, S N R Kazmi1
1Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal, 23955-6900, Saudi Arabia.
Abstract:
We demonstrate a simple and flexible technique to efficiently activate micro/nano-electromechanical systems (MEMS/NEMS) resonators at their fundamental and higher order vibration modes. The method is based on the utilization of the amplified voltage across an inductor, L, of an LC tank resonant circuit to actuate the MEMS/NEMS resonator. By matching the electrical and mechanical resonances, significant amplitude amplification is reported across the resonators terminals. We show experimentally amplitude amplification up to twelve times, which is demonstrated to efficiently excite several vibration modes of a microplate MEMS resonator and the fundamental mode of a NEMS resonator.
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