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Sputtering of silicon nanopowders by an argon cluster ion beam

Xiaomei Zeng1, Vasiliy Pelenovich2, Zhenguo Wang1

  • 1Department of Physics and Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, Hubei Nuclear Solid Physics Key Laboratory and Center for Ion Beam Application, School of Physics and Technology, Wuhan University, Wuhan, 430072, China.

Beilstein Journal of Nanotechnology
|January 26, 2019
PubMed

Keywords:
finite size effectgas cluster ion beamsilicon nanoparticlessmoothing effectsputtering

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