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Updated: Jan 30, 2026

Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications
Published on: April 21, 2016
Integration of a field effect transistor-based aptasensor under a hydrophobic membrane for bioelectronic nose
Alexander E Kuznetsov1, Natalia V Komarova1, Evgeniy V Kuznetsov1
1Scientific-Manufacturing Complex Technological Centre, 1-7 Shokin Square, Zelenograd, 124498 Moscow, Russian Federation.
Abstract:
A new bioelectronic nose based on a field effect transistor coupled with an aptamer as the sensing element was developed. The gas-to-liquid extraction interface required for appropriate aptamer function was integrated into standard CMOS technology. It was developed with the use of a sacrificial aluminium etching technique combined with surface modifications by silanes for wettability control. As a proof of concept, aptamer Van74 for vanillin was immobilized on the sensitive surface of the ISFET. The developed microsystem can selectively detect vanillin vapor in a concentration range from 2.7 ppt to 0.3 ppm, with a detection limit of 2.7 ppt. The sensor was able to detect vanillin in a gas sample obtained from roasted coffee beans. This outcome provides a foundation for developing a new generation of bioelectronic noses for the detection and discrimination of volatile compounds.
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