MEMS Actuators for Optical Microendoscopy

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Updated: Jan 30, 2026

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Published on: August 15, 2014

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Zhen Qiu1, Wibool Piyawattanametha2,3

  • 1Department of Biomedical Engineering, Institute for Quantitative Health Science and Engineering, Michigan State University, East Lansing, MI 48824, USA. qiuzhen@egr.msu.edu.

Micromachines
|January 27, 2019
PubMed

Keywords:
MEMS actuatorsconfocalfluorescencemicroendoscopyphotoacousticscannertwo-photonwide-filed imaging

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