Pulsed UV Laser Processing of Carbosilane and Silazane Polymers

Samuel Clark Ligon1, Gurdial Blugan2, Jakob Kuebler3

  • 1Laboratory for High Performance Ceramics, Empa, Swiss Federal Laboratories for Materials Science and Technology, Ueberlandstrasse 129, 8600 Duebendorf, Switzerland. clark.ligon@empa.ch.

Summary

Researchers created freestanding silicon carbonitride (SiCNO) ceramic pieces using laser crosslinking of polymer precursors. Laser parameters like wavelength and power significantly influenced the process, enabling selective crosslinking for microfabrication.

Related Concept Videos