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Pulsed UV Laser Processing of Carbosilane and Silazane Polymers
Samuel Clark Ligon1, Gurdial Blugan2, Jakob Kuebler3
1Laboratory for High Performance Ceramics, Empa, Swiss Federal Laboratories for Materials Science and Technology, Ueberlandstrasse 129, 8600 Duebendorf, Switzerland. clark.ligon@empa.ch.
Materials (Basel, Switzerland)
|January 27, 2019
Summary
Researchers created freestanding silicon carbonitride (SiCNO) ceramic pieces using laser crosslinking of polymer precursors. Laser parameters like wavelength and power significantly influenced the process, enabling selective crosslinking for microfabrication.
Area of Science:
- Materials Science
- Ceramics Engineering
- Additive Manufacturing
Background:
- Advanced ceramics like silicon carbonitride (SiCNO) are crucial for high-performance applications.
- Laser-based additive manufacturing offers precise control for fabricating complex ceramic microstructures.
- Developing efficient methods for producing freestanding ceramic components remains a challenge.
Purpose of the Study:
- To investigate the laser crosslinking of carbosilane and silazane polymers for producing freestanding SiCNO ceramic pieces.
- To explore the influence of different pulsed UV laser systems, wavelengths, power, and scanning speeds on the crosslinking process.
- To optimize the fabrication of sub-millimeter SiCNO features with controlled properties.
Main Methods:
- Utilized three different pulsed UV laser systems (wavelengths not specified) for polymer precursor crosslinking.
- Investigated the effects of laser parameters (wavelength, power, scanning speed) and photoinitiators.
- Employed pyrolysis in an inert atmosphere to convert crosslinked polymer precursors into SiCNO ceramics.
- Pre-treated glass substrates with fluorinated silanes to facilitate green body release.
Main Results:
- Successfully produced freestanding SiCNO ceramic pieces with sub-millimeter features.
- Identified laser wavelength, operating power, and scanning speed as critical parameters influencing crosslinking.
- Observed crosslinking with all tested laser systems, with varying degrees of success and side effects like bubbles and charring.
- Demonstrated selective polymer crosslinking by focusing the laser beam above the resin surface.
Conclusions:
- Laser crosslinking of specific polymer precursors is a viable method for fabricating freestanding SiCNO ceramics.
- Precise control over laser parameters and precursor chemistry is essential for successful microfabrication.
- The findings pave the way for advanced additive manufacturing of complex SiCNO ceramic components.

