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Updated: Jan 30, 2026

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
12:38

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium

Published on: December 16, 2011

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Thermal oxide patterning method for compensating coating stress in silicon substrates

Youwei Yao, Brandon D Chalifoux, Ralf K Heilmann

    Optics Express
    |January 31, 2019
    PubMed

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