Optical Biosensors Based on Silicon-On-Insulator Ring Resonators: A Review

Patrick Steglich1,2, Marcel Hülsemann3, Birgit Dietzel4

  • 1IHP-Leibniz-Institut für Innovative Mikroelektronik, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany. steglich@ihp-microelectronics.com.

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