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Updated: Jan 29, 2026

Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
Published on: May 23, 2018
Adriaan J M Mackus1, Marc J M Merkx1, Wilhelmus M M Kessels1
1Department of Applied Physics, Eindhoven University of Technology, P. O. Box 513, 5600 MB Eindhoven, The Netherlands.
Area-selective atomic layer deposition (ALD) is crucial for advanced semiconductor manufacturing and catalyst synthesis. Improving selectivity involves advanced ALD cycles with integrated surface correction steps to prevent unwanted deposition.
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