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Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition
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Synthesis and Exploratory Deposition Studies of Isotetrasilane and Reactive Intermediates for Epitaxial Silicon

Barry Arkles1, Youlin Pan1, Fernando Jove1

  • 1Gelest Inc. , Morrisville , Pennsylvania 19067 , United States.

Inorganic Chemistry
|February 21, 2019
PubMed

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