Electrical and Structural Properties of the Partial Ternary Thin-Film System Ni-Si-B

Matthias Wambach1, Nam Nguyen2, Sven Hamann1

  • 1Chair of MEMS Materials, Institute for Materials, Faculty of Mechanical Engineering , Ruhr-University Bochum , Universitaetsstrasse 150 , D-44801 Bochum , Germany.

ACS Combinatorial Science
|February 22, 2019
PubMed

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