Space charge layer effects in silicon studied by in situ surface transport

Frederik Edler1, Ilio Miccoli, Herbert Pfnür

  • 1Institut für Physik, Technische Universität Chemnitz, Reichenhainer Str. 70, 09126 Chemnitz, Germany. Institut für Festkörperphysik, Leibniz Universität Hannover, Appelstraße 2, 30167 Hannover, Germany.

Summary

Surface transport experiments reveal how Schottky barriers and space charge layers affect silicon surfaces. Defects formed during high-temperature treatments can act as p-type dopants, influencing subsurface electron transport.

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