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Laser Micromachining for Polymer Surface Topography Design
Published on: September 19, 2025
Advances in Capacitive Micromachined Ultrasonic Transducers
Kevin Brenner1, Arif Sanli Ergun2,3, Kamyar Firouzi4
1E.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USA. brennerk@stanford.edu.
Abstract:
Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial success. In this review paper, we touch upon recent advancements in CMUT technology at all levels of abstraction; modeling, fabrication, integration, and applications. Regarding applications, we discuss future trends for CMUTs and their impact within the broad field of biomedical imaging.
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