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Updated: Jan 28, 2026

A Polymer-based Piezoelectric Vibration Energy Harvester with a 3D Meshed-Core Structure
Published on: February 20, 2019
MEMS vibrational energy harvesters
Hiroshi Toshiyoshi1, Suna Ju2, Hiroaki Honma1
1Research Center for Advanced Science and Technology, The University of Tokyo, Tokyo, Japan.
Abstract:
In this paper, we look into the fundamental mechanism to retrieve the power from physical vibrations by using microelectromechanical systems (MEMS) energy harvesters. An analytical model is presented for the velocity-damped resonant generator (VDRG) that delivers electrical power through the power enhancement mechanism using the mechanical resonance of a suspended mass. Deliverable power is also analytically discussed with respect to the theoretical limit, and a view to understand the VDRG behaviors is presented in association with the impedance matching condition and the quality factors. Mechano-electric power conversions including electrostatic induction, electromagnetic induction, and piezoelectric effect are discussed to study the scaling effect. Recent examples of MEMS VDRGs are reviewed and evaluated in terms of the power density.
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