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Related Experiment Video

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MEMS vibrational energy harvesters.

Hiroshi Toshiyoshi1, Suna Ju2, Hiroaki Honma1

  • 1Research Center for Advanced Science and Technology, The University of Tokyo, Tokyo, Japan.

Science and Technology of Advanced Materials
|March 1, 2019
PubMed
Summary

This study presents an analytical model for microelectromechanical systems (MEMS) velocity-damped resonant generators (VDRGs) to harvest power from vibrations. It explores power conversion mechanisms and theoretical limits for enhanced energy harvesting applications.

Keywords:
201 Electronics / Semiconductor / TCOs206 Energy conversion / transport / storage / recovery208 Sensors and actuators400 Modeling / Simulations60 New topics / OthersMEMSenergy harvestermicroelectro-mechanical systemvelocity-damped resonant generator

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Area of Science:

  • Energy Harvesting
  • Microelectromechanical Systems (MEMS)
  • Vibration Energy Conversion

Background:

  • Physical vibrations are a ubiquitous source of wasted energy.
  • Microelectromechanical Systems (MEMS) offer miniaturized solutions for energy harvesting.
  • Velocity-damped resonant generators (VDRGs) are a specific MEMS technology for vibration energy capture.

Purpose of the Study:

  • To investigate the fundamental mechanism of power retrieval from physical vibrations using MEMS.
  • To present an analytical model for the velocity-damped resonant generator (VDRG).
  • To analyze VDRG behavior concerning power enhancement, theoretical limits, and scaling effects.

Main Methods:

  • Development of an analytical model for the VDRG.
  • Analysis of power delivery through mechanical resonance and power enhancement mechanisms.
  • Discussion of mechano-electric power conversion methods (electrostatic, electromagnetic, piezoelectric) and their scaling effects.
  • Review and evaluation of existing MEMS VDRG examples based on power density.

Main Results:

  • An analytical model for VDRG performance is presented.
  • Deliverable power is discussed relative to theoretical limits.
  • VDRG behavior is understood through impedance matching and quality factor analysis.
  • Scaling effects of different mechano-electric conversion methods are explored.

Conclusions:

  • The study provides a framework for understanding and optimizing MEMS VDRGs for vibration energy harvesting.
  • Analysis highlights the importance of impedance matching and quality factors for efficient power transfer.
  • Different power conversion mechanisms exhibit distinct scaling properties relevant to MEMS applications.