Chemical Vapor Deposition of Phase-Pure Uranium Dioxide Thin Films from Uranium(IV) Amidate Precursors
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Updated: Jan 28, 2026

Separation of Uranium and Thorium for 230Th-U Dating of Submarine Hydrothermal Sulfides
Published on: May 20, 2019
Mark D Straub1,2, Jennifer Leduc3, Michael Frank3
1Department of Chemistry, University of California, Berkeley, Berkeley, CA, 94720, USA.
Abstract:
Homoleptic uranium(IV) amidate complexes have been synthesized and applied as single-source molecular precursors for the chemical vapor deposition of UO2 thin films. These precursors decompose by alkene elimination to give highly crystalline phase-pure UO2 films with an unusual branched heterostructure.
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