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Grazing-incidence small-angle X-ray scattering study of correlated lateral density fluctuations in W/Si multilayers

K V Nikolaev1, S N Yakunin2, I A Makhotkin1

  • 1MESA+ Institute for Nanotechnology, University of Twente, Netherlands.

Acta Crystallographica. Section A, Foundations and Advances
|March 2, 2019
PubMed

Keywords:
density fluctuationsdiffuse scatteringmultilayer coatingsthin films

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