Confocal fluorescence microscopy for geometry parameter measurements of submerged micro-structures
Optics Letters
|March 2, 2019
Summary
Contactless in situ measurement using confocal fluorescence microscopy accurately determines micro-manufacturing workpiece dimensions submerged in fluid. This technique achieves a measurement uncertainty of 8.8 μm, crucial for quality control in challenging environments.
Area of Science:
- Metrology
- Microscopy
- Manufacturing Engineering
Background:
- Micro-manufacturing requires contactless in situ measurements for quality control.
- Submerged workpieces and small dimensions challenge conventional metrology.
- Fluid environments necessitate non-contact measurement solutions.
Purpose of the Study:
- To develop and validate a contactless measurement technique for micro-manufacturing.
- To enable in situ quality control of submerged workpieces.
- To assess the feasibility of confocal fluorescence microscopy for precise dimensional analysis.
Main Methods:
- Utilized confocal fluorescence microscopy for step height measurements.
- Submerged specimens in a 2.6 mm thick fluid layer.
- Applied model fitting of fluorescence intensity to measured signals for data analysis.
Main Results:
- Achieved a measurement uncertainty of 8.8 μm for step height measurements.
- Demonstrated the capability of confocal fluorescence microscopy in fluid environments.
- Derived a minimal achievable uncertainty of 0.07 μm for shot-noise-limited signals.
Conclusions:
- Confocal fluorescence microscopy is a viable contactless method for in situ metrology in micro-manufacturing.
- The technique offers high precision for submerged specimen analysis.
- Further potential exists for enhanced accuracy with optimized signal conditions.
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