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Structural and Functional Properties of the Thin Film System Ti-Ni-Si

Matthias Wambach1, Pawel Ziolkowski2, Eckhard Müller2,3

  • 1Chair for MEMS Materials, Institute for Materials, Faculty of Mechanical Engineering , Ruhr University Bochum , Universitaetsstrasse 150 , D-44801 Bochum , Germany.

ACS Combinatorial Science
|March 2, 2019
PubMed

Keywords:
Seebeck coefficientsputteringstructure−property relationshipsthin films

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