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Deflectometry encoding the measured angle in a time-dependent intensity signal.

Pablo Pedreira1, Josep Nicolas1, Igors Šics1

  • 1ALBA Synchrotron Light Source, 08290 Cerdanyola del Vallès, Barcelona, Spain.

The Review of Scientific Instruments
|March 6, 2019
PubMed
Summary
This summary is machine-generated.

We developed a novel deflectometer for precise, high-speed, low-noise angle measurements. This new design uses harmonic analysis of a photodiode signal instead of CCD pattern displacement for improved performance in optical metrology.

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Area of Science:

  • Optical Metrology
  • Instrumentation Science
  • Precision Engineering

Background:

  • State-of-the-art slope-measuring profilometers require high accuracy, high sampling rates, and low noise.
  • Existing methods, such as those using CCDs in autocollimators, may limit measurement speed and precision.
  • The need for advanced metrology instruments is driven by demanding applications in optics manufacturing and testing.

Purpose of the Study:

  • To introduce a new deflectometer concept for enhanced optical metrology.
  • To achieve high accuracy measurements with high sampling rates and low noise.
  • To meet the stringent requirements of advanced profilometers like Long Trace Profilometers.

Main Methods:

  • Modified the working principle of traditional autocollimators.
  • Utilized time-modulated intensity signals acquired by a photodiode.
  • Analyzed harmonic contents of the photodiode signal to determine measured angles, replacing CCD pattern displacement.

Main Results:

  • The proposed deflectometer enables angle measurement based on signal harmonics, not pixel displacement.
  • Achieved significantly higher sampling rates, in the millions of samples per second.
  • Demonstrated potential for low-noise, high-accuracy measurements suitable for advanced optical instruments.

Conclusions:

  • The novel deflectometer concept offers a viable alternative for high-performance angle metrology.
  • This approach overcomes limitations of traditional CCD-based methods in terms of speed and noise.
  • The technology is well-suited for next-generation slope-measuring profilometers and optical testing applications.