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Surface shape determination with a stitching Michelson interferometer and accuracy evaluation.

F Polack1, M Thomasset1, S Brochet1

  • 1Synchrotron SOLEIL, L'Orme des Merisiers, Saint-Aubin, BP 48, 91192 Gif-sur-Yvette Cedex, France.

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|March 6, 2019
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Summary
This summary is machine-generated.

This study investigates the accuracy of stitching methods for high-precision optical surface measurements. A novel method is proposed to determine reference surface errors before stitching, enhancing surface topography reconstruction for synchrotron beamlines.

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Area of Science:

  • Optical engineering
  • Metrology
  • Surface characterization

Background:

  • Stitching methods are crucial for measuring large, high-precision optical elements in synchrotron beamlines.
  • These methods reconstruct surface topography from overlapping measurements using various algorithms.

Purpose of the Study:

  • To investigate the accuracy and truthfulness of surface topography reconstruction using stitching methods.
  • To identify and evaluate error sources in the acquisition and processing steps of stitching interferometry.

Main Methods:

  • Analysis based on the SOLEIL Michelson interferometer for nano-topography.
  • Development of a method to determine errors in the interferometric reference surface estimate.
  • Error determination performed independently of the stitching procedure.

Main Results:

  • Identification and evaluation of error sources in stitching interferometry.
  • A proposed method for pre-stitching error assessment of the reference surface.
  • Demonstration of the method's application using a dedicated nano-topography measurement bench.

Conclusions:

  • Stitching methods require careful error analysis for accurate surface shape determination.
  • The proposed method allows for independent assessment of reference surface errors, improving stitching accuracy.
  • This research contributes to reliable metrology for advanced optical components.