Focus Tracking System for Femtosecond Laser Machining using Low Coherence Interferometry

Marcus Paulo Raele1, Lucas Ramos De Pretto2, Wagner de Rossi2

  • 1Nuclear and Energy Research Institute, IPEN-CNEN/SP, Av. Prof. Lineu Prestes, 2242, Cidade Universitária, 05508-000, São Paulo, SP, Brazil. mpraele@ipen.br.

Scientific Reports
|March 14, 2019
PubMed
Summary

This study presents a novel real-time focus tracking system for laser machining. The system ensures stable processing by maintaining the sample within the laser

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