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A new route for fabricating polymer optical microcavities.

Zhang Zhang1, Ni Yao, Jing Pan

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Researchers fabricated ultra-smooth SU-8 optical microcavities using self-assembly. These high-Q factor microcavities enabled a stable, sensitive temperature sensor, showing potential for advanced sensors and microlasers.

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Area of Science:

  • Optics and Photonics
  • Materials Science
  • Nanotechnology

Background:

  • Whispering gallery mode (WGM) optical microcavities are crucial for various photonic applications.
  • Achieving ultra-smooth surfaces and high quality (Q) factors is essential for enhancing microcavity performance.
  • Developing stable and sensitive sensing platforms remains a key challenge in micro-optics.

Purpose of the Study:

  • To fabricate SU-8 based WGM optical microcavities with an ultra-smooth surface and high Q-factors.
  • To demonstrate the application of these microcavities in a packaged temperature sensor.
  • To evaluate the sensitivity and long-term stability of the developed temperature sensor.

Main Methods:

  • Utilized a self-assembly method for fabricating SU-8 microcavities.
  • Characterized the microcavity surface roughness (σ < 0.6 nm) and Q-factors (∼10^4).
  • Packaged the microcavities using polydimethylsiloxane (PDMS) to create a temperature sensor.

Main Results:

  • Successfully fabricated SU-8 WGM microcavities with an ultra-smooth surface and high Q-factors.
  • Demonstrated a PDMS-packaged temperature sensor with high sensitivity (120 pm/°C).
  • Confirmed excellent long-term stability of the sensor over one year.

Conclusions:

  • The self-assembly method is effective for producing high-performance SU-8 optical microcavities.
  • The developed microcavity-based temperature sensor offers high sensitivity and stability.
  • These findings highlight the potential of SU-8 microcavities for ultrasensitive sensors and microlasers.