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Pose error correction in offline three-dimensional profile measurement system for large-diameter aspheric mirror
Applied Optics
|March 16, 2019
Summary
This study introduces an offline method for measuring large aspheric mirrors during grinding. The technique improves profile accuracy by eliminating alignment errors, enhancing precision for optical components.
Area of Science:
- Optical Engineering
- Metrology
- Manufacturing Science
Background:
- Accurate measurement of large aspheric mirrors is critical for optical system performance.
- Existing methods face challenges in precision during the grinding stage.
Purpose of the Study:
- To develop an offline measurement method for large aspheric mirrors during grinding.
- To establish a mathematical model for three-dimensional (3D) profile measurement.
- To improve measurement accuracy by addressing alignment errors.
Main Methods:
- A cylindrical coordinate system-based measurement method and mathematical model were proposed.
- Error analysis of measurement and workpiece coordinate systems was performed.
- Nonlinear least squares method was used to eliminate pose errors.
Main Results:
- A 3D profile model was established for evaluating entire surface profile error.
- Total uncertainties of the measurement system were estimated.
- Profile accuracy for a 300-mm K9 glass workpiece improved from 15.3 to 7.12 μm after error elimination.
Conclusions:
- The proposed offline measurement method effectively improves the accuracy of large aspheric mirror profiles.
- Eliminating eccentricity and tilt errors significantly enhances measurement precision.
- The method provides a reliable approach for quality control in aspheric mirror manufacturing.
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