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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

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Polarization beam splitter based on a silicon nitride-silica-silicon horizontal slot waveguide

Yang Liu, Limin Chang, Zezheng Li

    Optics Letters
    |March 16, 2019
    PubMed

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