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Updated: Jan 27, 2026

Author Spotlight: Advancements in High-Performance Thermoelectric Thin Films Through Radio Frequency Magnetron Sputtering
Published on: May 17, 2024
Metal Oxide Thin Films Prepared by Magnetron Sputtering Technology for Volatile Organic Compound Detection in the
Artur Rydosz1, Andrzej Brudnik2, Kamil Staszek3
1Department of Electronics, AGH University of Science and Technology, Al. Mickiewicza 30, 30-059 Krakow, Poland. rydosz@agh.edu.pl.
Abstract:
Metal oxide thin films such as copper oxide, titanium dioxide, and tin dioxide deposited by magnetron sputtering technology were verified as a gas-sensitive layer in microwave-based gas sensors operated at 2.4 GHz. The developed gas sensors were tested at room temperature (23 °C) and 50% relative humidity (RH) under exposure to 0⁻200 ppm of selected volatile organic compounds (acetone, ethanol, and methanol) that are of high interest in industry and biomedical applications. The highest responses to acetone were obtained for CuO-based gas sensors, to ethanol for SnO₂-based gas sensors, while for methanol detection both dioxides, SnO₂ and TiO₂, exhibited good sensitivity.
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