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Updated: Jan 27, 2026

Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing
Published on: March 7, 2018
Fabrication of a nanofiber Bragg cavity with high quality factor using a focused helium ion beam
Abstract:
Nanofiber Bragg cavities (NFBCs) are solid-state microcavities fabricated in an optical tapered fiber. NFBCs are promising candidates as a platform for photonic quantum information devices due to their small mode volume, ultra-high coupling efficiencies, and ultra-wide tunability. However, the quality (Q) factor has been limited to be approximately 250, which may be due to limitations in the fabrication process. Here we report high Q NFBCs fabricated using a focused helium ion beam. Whenan NFBC with grooves of 640 periods is fabricated, the Q factor is over 4170, which is more than 16 times larger than that previously fabricated using a focused gallium ion beam.
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