Micromachined phase-shifted array-type Mirau interferometer for swept-source OCT imaging: design, microfabrication...

Area of Science:

• Biomedical Engineering
• Optical Imaging
• Microfabrication

Background:

• Optical Coherence Tomography (OCT) offers non-invasive 3D optical biopsies but is limited by bulky, expensive equipment, restricting its use in early diagnostics.
• Micro-Opto-Electro-Mechanical Systems (MOEMS) technologies present a viable solution for reducing OCT system size and cost.

Purpose of the Study:

• To design and fabricate a miniaturized OCT system using an active array of Mirau microinterferometers.
• To implement phase-shifting techniques for enhanced sensitivity and elimination of interferometric artifacts.

Main Methods:

• Design of a novel imaging system incorporating a 4x4 array of Mirau microinterferometers.
• Microfabrication and assembly of the Mirau microinterferometer with vertical comb-drive microactuators for reference mirror control.
• Integration with swept-source OCT for imaging.

Main Results:

• Successful design and fabrication of a compact Mirau microinterferometer array.
• Demonstration of phase-shifting capability for improved interferometric measurements.
• Feasibility of swept-source OCT imaging with the developed MOEMS-based system.

Conclusions:

• The proposed MOEMS-based Mirau microinterferometer array significantly reduces the size and cost of OCT systems.
• This technology holds promise for widespread adoption of OCT as an accessible early diagnostic tool.