Vibration Detection and Motion Compensation for Multi-Frequency Phase-Shifting-Based 3D Sensors

Area of Science:

• Optical Metrology
• 3D Imaging
• Industrial Inspection

Background:

• Phase-shifting profilometry, particularly multi-frequency methods, is vital for in situ 3D metrology and industrial part inspection.
• Environmental vibrations are a significant source of measurement errors in these applications, compromising accuracy.
• Existing methods may struggle with the speed and effectiveness required for real-time industrial environments.

Purpose of the Study:

• To present an effective and rapid vibration detection and motion compensation technique for multi-frequency phase-shifting 3D sensors.
• To enable accurate 3D metrology in the presence of unavoidable environmental vibrations.
• To provide a method that quantifies vibration intensity and corrects phase errors without relying on neighboring pixel data.

Main Methods:

• Development of a novel vibration detection algorithm for multi-frequency phase-shifting systems.
• Implementation of a motion compensation strategy that revises the wrapped phase map.
• Simulation of varying vibration intensities using an industrial robot to validate the method's performance.

Main Results:

• The proposed method successfully detects and quantifies vibration intensity.
• Motion compensation effectively corrects phase errors caused by vibrations.
• Experimental validation demonstrated the method's feasibility and capability in a realistic industrial scenario.

Conclusions:

• The presented method offers a robust solution for mitigating vibration-induced errors in phase-shifting profilometry.
• It is suitable for 3D inspection systems operating in vibration-prone industrial environments.
• The technique enhances the reliability and accuracy of in situ 3D metrology.