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Updated: Jan 27, 2026

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
Buckled carbon nanotube network thin-film fabricated using chemically swelled elastomer substrates
Hongjun Kim1, Eunsuk Choi1, Minho Jung1
1Department of Electronic Engineering, Hanyang University, Seoul 04763, Republic of Korea.
Abstract:
We report on the fabrication of buckled carbon nanotube thin-film networks (CNTN) that increases in conductivity with applied tactile pressure. When tactile pressure was applied, the buckled nanotubes collapsed and increased in interconnected density and as a result increased the thin-film conductivity. Unlike conventional methods using mechanically expanded elastomers, we utilize chemically swollen elastomers as the expanded substrate to transfer the CNTN. As the chemical evaporates, it compresses the CNTN causing the thin-film to buckle. The CNTN compression can be controlled by using organic solvents with differing elastomer absorption rates. Our method requires no mechanical instruments and shows in-plane multi-axial uniform strain for the entire substrate surface. Since the buckling was controlled chemically, the buckled CNTN can be produced reliably, furthering the possibility of its application as the active sensing material for highly sensitive tactile pressure sensors.
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