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Updated: Jan 27, 2026

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
Published on: April 29, 2020
Neutron depth profiling system at CARR
Tang Chanjuan1, Xiao Caijin1, Yao Yonggang1
1China Institute of Atomic Energy, Xinzhen, Fangshan District, Beijing, 102413, China.
Abstract:
A neutron depth profiling (NDP) device was developed on China advanced research reactor (CARR) of China Institute of Atomic Energy (CIAE). The CARR-NDP device uses cold neutron beams transmitted by a neutron guide from the cold neutron source of CARR, and it is composed of a neutron beam collimator, and a vacuum target chamber containing a beam stopper and a detection system. The neutron flux at 1 m from the end of neutron guide is about 4.8 × 108 n cm-2 s-1 under operating power of 15 MW. A standard reference material SRM-2137 sample and a multilayer film sample were utilized to verify the performances of the CARR-NDP device.
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