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An Optical MEMS Acoustic Sensor Based on Grating Interferometer.

Mengying Zhang1,2, Gaomi Wu3,4, Dipeng Ren5,6

  • 1State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China. zhangmengying411@sina.com.

Sensors (Basel, Switzerland)
|March 31, 2019
PubMed
Summary

This study presents a stable Micro-Electro-Mechanical System (MEMS) acoustic sensor using a grating interferometer. The novel design ensures consistent performance across a wide temperature range, enhancing acoustic detection capabilities.

Keywords:
MEMSacoustic sensorsgratinginterferometrystability

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Area of Science:

  • Micro-Electro-Mechanical Systems (MEMS)
  • Optical Sensing
  • Acoustic Transduction

Background:

  • Acoustic detection is crucial for numerous applications.
  • Existing sensors face challenges with environmental temperature variations.
  • Micro-Electro-Mechanical System (MEMS) technology offers miniaturization and integration potential.

Purpose of the Study:

  • To develop a highly stable MEMS acoustic sensor.
  • To improve sensor performance against environmental temperature fluctuations.
  • To achieve high sensitivity and signal quality for acoustic detection.

Main Methods:

  • Fabrication of a MEMS acoustic sensor utilizing a grating interferometer.
  • Design of a short-cavity structure to minimize temperature effects on cavity length.
  • Incorporation of through holes in the grating substrate to reduce air damping.
  • Integration of a silicon diaphragm, micro-grating, laser diode, and photodetector.

Main Results:

  • A MEMS acoustic sensor with a 16.919 µm deep cavity and 2.4 µm period grating was successfully fabricated.
  • The sensor demonstrated high-quality output voltage signals in response to acoustic waves.
  • Achieved a sensitivity of -15.14 dB re 1 V/Pa @ 1 kHz.
  • The sensor exhibited minimal output signal change between 5 °C and 55 °C, indicating high temperature stability.

Conclusions:

  • The developed MEMS grating interferometer acoustic sensor offers excellent stability against temperature variations.
  • The sensor design effectively mitigates environmental impacts, ensuring reliable acoustic detection.
  • This technology holds promise for advanced acoustic sensing applications requiring high precision and stability.