Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass

Frederik Kotz1, Patrick Risch1, Karl Arnold1

  • 1NeptunLab, Laboratory of Process Technology, Department of Microsystems Engineering (IMTEK), University of Freiburg, Georges-Köhler-Allee 103, Freiburg, 79110, Germany.

Nature Communications
|March 31, 2019
PubMed

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