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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Simultaneous determination of local thickness and composition for ternary III-V semiconductors by

P Kükelhan1, A Beyer1, S Firoozabadi1

  • 1Materials Science Centre and Faculty of Physics, Philipps University Marburg, Hans-Meerwein-Straße 6, Marburg, Germany.

Ultramicroscopy
|March 31, 2019
PubMed

Keywords:
III-V semiconductorsQuantitative STEMcomposition determinationimage simulations

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