Interaction of short laser pulses with model contamination microparticles on a high reflector

The response of model contamination particles located on the surface of a multilayer dielectric mirror when exposed to 1053 nm laser pulses of 10 ps or 0.6 ps duration is investigated. Four different particle types were studied: stainless steel, borosilicate glass, polyethylene, and polytetrafluoroethylene, all having an average diameter of about 40 μm. Irradiation with one laser pulse caused particles to eject from the surface with an onset fluence in the range 5× to 100×, depending on the particle type, below the particle-free, laser-induced damage threshold of the mirror. Morphological analysis showed, however, that the ejection process always generated ablation craters and/or secondary contamination, both of which can degrade the performance of the optic during subsequent pulses. Ejection and damage mechanisms are discussed for each particle type.