Embedded, Fully Spray-Coated Pressure Sensor Using a Capacitive Transducing Mechanism
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Updated: Jan 26, 2026

Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique
Published on: March 24, 2023
Christina Offenzeller1, Marcel Knoll2, Bernhard Jakoby3
1Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, 4040 Linz, Austria. christina.offenzeller@jku.at.
Abstract:
Embedding functional sensor layers directly into mechanical systems in heavy-duty surroundings facilitate the real-time monitoring of the system's state. This work presents a fully-spray coated pressure sensor that is suitable for applications in the high pressure range. It is embedded into functionalized organic coatings that additionally act as a dielectric for the capacitive sensing mechanism. The sensitivity of the sensor, as well as its long-time stability, has been determined. Additionally, testing has been performed at elevated temperatures to determine the temperature dependent sensitivity that arises from the temperature dependence of the Young's moduli.
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