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Flexible Polymer Device Based on Parylene-C with Memory and Temperature Sensing Functionalities.

Min Lin1, Qingyu Chen2, Zongwei Wang3

  • 1Institude of Microelectronics, Peking University, Beijing 100871, China. lin.min@pku.edu.cn.

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|April 12, 2019
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Summary
This summary is machine-generated.

This study introduces a flexible polymer device using parylene-C for memory and temperature sensing. The material exhibits stable resistive switching for flexible RRAM and linear resistance changes for temperature sensing applications.

Keywords:
flexibleresistive random-access memorytemperature sensorwearable devices

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Area of Science:

  • Materials Science
  • Polymer Science
  • Electronics

Background:

  • Polychloro-para-xylylene (parylene-C) is a flexible, transparent polymer known for chemical stability and biocompatibility.
  • Flexible electronic devices require advanced materials with multifunctional capabilities.

Purpose of the Study:

  • To demonstrate a single-component parylene-C polymer device with both memory and temperature sensing functionalities.
  • To explore the potential of parylene-C in flexible resistive random-access memory (RRAM) and temperature sensors.

Main Methods:

  • Fabrication of a polymer device using single-component parylene-C.
  • Characterization of resistive switching behavior using I-V curves and conductive atomic force microscopy (CAFM).
  • Analysis of temperature sensing capabilities by measuring resistance changes over a temperature range.

Main Results:

  • The device exhibited stable bipolar resistive switching with a large storage window (>10⁴) and low operating voltages, indicating potential for RRAM.
  • A metallic filamentary-type switching mechanism, involving metal bridge formation/dissolution via redox reactions, was confirmed.
  • The low-resistance state showed a nearly linear resistance-temperature relationship (25 °C to 100 °C) with a TCR of 2.136 × 10⁻³/°C, suitable for temperature sensing.

Conclusions:

  • Single-component parylene-C devices offer promising solutions for flexible RRAM due to their stable switching characteristics.
  • The material's properties also enable its use as a flexible temperature sensor, leveraging the temperature-dependent resistance in its low-resistance state.