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Spatio-Temporal Proximity Characteristics in 3D μ-Printing via Multi-Photon Absorption
Erik Hagen Waller1, Georg Von Freymann2,3
1Physics Department and Research Center OPTIMAS, University of Kaiserslautern, 67663 Kaiserslautern, Germany. erik.waller@physik.uni-kl.de.
Polymers
|April 13, 2019
Summary
Understanding the proximity effect in micro-printing is crucial for high-resolution feature fabrication. Our study reveals molecular diffusion significantly contributes to this effect, impacting feature resolution.
Area of Science:
- Materials Science
- Nanotechnology
- Photolithography
Background:
- High-resolution micro-printing faces challenges due to feature cross-talk, known as the proximity effect.
- This effect limits the fabrication of sub-hundred-nanometer periodic structures like gratings.
- The spatial and temporal dynamics of the proximity effect remain underexplored.
Purpose of the Study:
- To develop and apply a novel method for dynamically measuring the proximity effect in micro-printing.
- To investigate the influence of different photoresists on proximity effect strength.
- To elucidate the underlying mechanisms contributing to the proximity effect.
Main Methods:
- Utilized a spatial-light-modulator based system for dynamic proximity effect measurements.
- Evaluated proximity effect strength across various length and time scales relevant to micro-printing.
- Compared the proximity effect in different photoresist materials.
Main Results:
- Successfully measured the proximity effect's strength dynamically.
- Demonstrated significant differences in proximity effect strength across various photoresists.
- Identified molecular diffusion as a major contributing factor to the proximity effect.
Conclusions:
- The developed method allows for precise characterization of the proximity effect.
- Photoresist properties critically influence the proximity effect.
- Molecular diffusion plays a key role in limiting resolution in micro-printing processes.
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