Indium⁻Tin⁻Oxide Nanostructures for Plasmon-Enhanced Infrared Spectroscopy: A Numerical Study

Plasmonic nanoantennas can significantly enhance the light-matter interactions at the nanoscale, and as a result have been used in a variety of applications such as sensing molecular vibrations in the infrared range. Indium-tin-oxide (ITO) shows metallic behavior in the infrared range, and can be used for alternative plasmonic materials. In this work, we numerically studied the optical properties of hexagonal ITO nanodisk and nanohole arrays in the mid-infrared. Field enhancement up to 10 times is observed in the simulated ITO nanostructures. Furthermore, we demonstrated the sensing of the surface phonon polariton from a 2-nm thick SiO₂ layer under the ITO disk arrays. Such periodic arrays can be readily fabricated by colloidal lithography and dry etching techniques; thus, the results shown here can help design efficient ITO nanostructures for plasmonic infrared applications.