Improvement on Fluorine Migration from SF6 to SiF4 by an Efficient Mediator of Fe2O3/Cr2O3 Composites

Jianzhong Wu, Jia Zhang, Zhenbang Cao1

  • 1School of Chemical Engineering and Australian Centre for Nanomedicine (ACN) , University of New South Wales , Sydney , New South Wales 2052 , Australia.

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