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On-chip silicon Mach-Zehnder interferometer sensor for ultrasound detection.
Optics Letters
|April 16, 2019
Summary
This study introduces a highly sensitive ultrasound sensor using integrated photonics Mach-Zehnder interferometers (MZI). The silicon-on-insulator device achieves a low detection limit, showing promise for various applications.
Area of Science:
- Photonics
- Integrated Photonics
- Sensor Technology
Background:
- Ultrasound sensing is crucial for numerous applications.
- Existing ultrasound sensors face limitations in sensitivity and dynamic range.
- Integrated photonics offers a platform for miniaturized and high-performance sensors.
Purpose of the Study:
- To develop a highly sensitive ultrasound sensor utilizing a Mach-Zehnder interferometer (MZI) on a silicon-on-insulator platform.
- To characterize the performance of the MZI-based ultrasound sensor, including sensitivity, bandwidth, detection limit, and dynamic range.
- To explore the potential of this integrated photonics sensor for practical applications.
Main Methods:
- Fabrication of an integrated photonics Mach-Zehnder interferometer (MZI) sensor using silicon-on-insulator technology.
- Integration of a sensing spiral on a 121μm×121μm membrane to detect ultrasound-induced vibrations.
- Characterization of the sensor's transfer function, sensitivity, bandwidth, detection limit, and dynamic range.
Main Results:
- The MZI-based ultrasound sensor demonstrated high sensitivity, reaching a maximum of 0.62 mV/Pa.
- The sensor exhibited a detection limit of 0.38 mPa/Hz1/2 at 0.47 MHz with 1.0 mW optical power.
- A dynamic range of 59 dB was achieved, with a sensor transfer function centered at 0.47 MHz and a -6 dB bandwidth of 21.2%.
Conclusions:
- The integrated photonics Mach-Zehnder interferometer (MZI) sensor is a highly sensitive device for ultrasound detection.
- The sensor's performance, including its detection limit and dynamic range, is promising for various applications.
- The MZI's flexible wavelength operation facilitates sensor integration and broadens its application scope.
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