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Research on the Surface Evolution of Single Crystal Silicon Mirror Contaminated by Metallic Elements during Elastic

Wanli Zhang1, Feng Shi2, Yifan Dai3

  • 1College of Artificial Intelligence and Automation, National University of Defense Technology, 109 Deya Road, Changsha 410073, Hunan, China. zhangwanli17@nudt.edu.cn.

Materials (Basel, Switzerland)
|April 17, 2019
PubMed

Keywords:
EJPSAEinfrared laser systemmetallic contaminantsingle crystal siliconsurface quality

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